FinFET With Encased Air-Gap Spacers for High-Performance and Low-Energy Circuits
Author:
Funder
Applied Materials, Inc.
Entegris, Inc.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/55/7802592/07744575.pdf?arnumber=7744575
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