Investigation of Dielectric and Quantum Confinement Based Dopant Deactivation in the Extension Region of FinFET

Author:

Saurabh Nishant1ORCID,Patil Shubham1ORCID,Rawat Amita1ORCID,Chiarella Thomas2,Parvais Bertrand2ORCID,Ganguly Udayan1ORCID

Affiliation:

1. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India

2. IMEC, Leuven, Belgium

Funder

Department of Science and Technology (DST) Nano Mission, India

Ministry of Electronics and IT (MeitY) and Department of Electronics through the Nanoelectronics Network for Research and Applications (NNETRA) Project

Indian Institute of Technology (IIT) Bombay Nano-Fabrication (IITBNF) Facility, IIT Bombay

Center for Excellence (CEN), IIT Bombay

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Reference17 articles.

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