A comparison model of V- and Z-shaped electrothermal microactuators
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/7219495/7237445/07237626.pdf?arnumber=7237626
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. An analytical nonlinear displacement model of electrothermal V-shaped actuator;Vietnam Journal of Mechanics;2024-06-29
2. Nonlinear Displacement of the Electrothermal V-Shaped Actuator;Shock and Vibration;2024-05-02
3. Giảm thấp điện áp dẫn của bộ vi kích hoạt điện nhiệt dạng dầm chữ V bằng phương pháp phún xạ bề mặt;Journal of Military Science and Technology;2023-12-25
4. Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator;Machines;2023-06-29
5. Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process;Microelectronics International;2023-02-02
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