First demonstration of full integration and characterization of 4F² 1S1M cells with 45 nm of pitch and 20 nm of MTJ size
Author:
Affiliation:
1. SK hynix Inc.,Icheon,Korea
2. Kioxia Korea Corporation,Seoul,Korea
3. Kioxia Corporation,Yokohama,Japan
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10019319/10019320/10019549.pdf?arnumber=10019549
Reference19 articles.
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