Simulation for the feasibility of high-mobility channel in 3D nand memory
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/8360436/8369163/08369198.pdf?arnumber=8369198
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4. Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND;Solid State Phenomena;2021-02
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