Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD
Author:
Affiliation:
1. Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea
2. Materials Research Center for Element Strategy, Tokyo Institute of Technology, Mailbox SE-1, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
Funder
Ministry of Education, Culture, Sports, Science and Technology
Korea Display Research Corporation
Ministry of Trade, Industry and Energy
Japan Society for the Promotion of Science
Samsung Display
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.9b14310
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