Author:
Yanagida H.,Yoshida S.,Esashi M.,Tanaka S.
Cited by
5 articles.
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1. Review of polymer MEMS micromachining;Journal of Micromechanics and Microengineering;2015-11-19
2. Removal of SU-8 by two types of hot-wire atomic hydrogen sources—Dissection of contributions by atomic hydrogen and substrate heating;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-09
3. Study of Metal Etching Using Ozone Water;Electrical Engineering in Japan;2015-06-14
4. Integrated Microsystems;Advances in Science and Technology;2012-09-11
5. Study of Metal Etching using Ozone Water;IEEJ Transactions on Sensors and Micromachines;2012