High Coupling Coefficient Resonance Mode in Al0.68Sc0.32N Surface Acoustic Wave Resonator with AlN Buffer Layer on a Silicon Substrate-Reference-Cited by-同舟云学术

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High Coupling Coefficient Resonance Mode in Al0.68Sc0.32N Surface Acoustic Wave Resonator with AlN Buffer Layer on a Silicon Substrate

Published:2020-07 Issue: Volume: Page:
ISSN:
Container-title:2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
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Author:

Tang Zichen,D'Agati Michael,Olsson Roy H.

Funder

National Science Foundation (NSF)

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9215568/9234808/09234828.pdf?arnumber=9234828

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Q SAW Resonators Based on High-Crystallinity AlScN-AlN-Sapphire Substrate;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

2. High Electromechanical Coupling SAW Resonators Based on a-Plane AlScN-AlN-Sapphire Substrate;2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM);2022-07-18

3. Intrinsically Switchable GHz Ferroelectric ScAlN SAW Resonators;2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF);2022-06-27

4. High-Performance SAW Resonators at 3 GHz Using AlScN on a 4H-SiC Substrate;2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2022-04-24

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