Intrinsically Switchable GHz Ferroelectric ScAlN SAW Resonators
Author:
Affiliation:
1. Cornell University,Electrical and Computer Engineering,Ithaca,NY,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9870057/9870041/09870089.pdf?arnumber=9870089
Reference16 articles.
1. A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
2. AlScN: A III-V semiconductor based ferroelectric
3. Temperature-dependent Lowering of Coercive Field in 300 nm Sputtered Ferroelectric Al0.70Sc0.30N
4. Towards Realizing the Low-Coercive Field Operation of Sputtered Ferroelectric ScxAl1-xN
5. AlScN Programmable Ferroelectric Micromachined Ultrasonic Transducer (FMUT)
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