Piezoelectric MEMS Speaker with Rigid-Flexible-Coupling Actuation Layer
Author:
Affiliation:
1. Shanghai Jiao Tong University,National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai,CHINA,200240
Funder
Program of Shanghai Academic/Technology Research Leader
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699681.pdf?arnumber=9699681
Reference18 articles.
1. Low Frequency Sound Pressure Level Improvement of Piezoelectric Mems Microspeaker Using Novel Spiral Spring with Dual Electrode
2. Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators
3. Wearable Multifunctional Piezoelectric MEMS Device for Motion Monitoring;wang;Health Warning and Earphone Nano Energy,2021
4. Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism
5. Study of Fabrication and Etching Processes of PZT Thin Films on Silicon;zhao;PIEZOELECTRICS & ACOUSTOOPTICS,2001
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. MEMS audio speakers *;Journal of Micromechanics and Microengineering;2023-11-29
2. Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review;Micromachines;2023-04-14
3. A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm;Micromachines;2023-03-22
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