Affiliation:
1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
2. Department of Micro/Nano-Electronics, Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai 200240, China
Abstract
To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flexible coupling supporting layer. Measurements performed on encapsulated prototypes mounted to an artificial ear simulator have revealed that, compared to a speaker with a rigid supporting layer, the sound pressure level (SPL) of the proposed piezoelectric MEMS speaker with a rigid–flexible coupling supporting layer is significantly higher and is especially higher by 4.1–20.1 dB in the frequency range from 20 Hz to 4.2 kHz, indicating that the rigid–flexible coupling supporting layer can improve the SPL significantly in low frequency. Moreover, the spectral distribution characteristic of its playback audio is similar to that of the commercial electromagnetic type. The device can also function as a silent alarm based on oral airflows in dangerous situations, as it performs well at recognizing words according to their unique voltage-signal characteristics, and can avoid the effects of external sound noise, body movement, long distance, and occlusion. This strategy provides inspiration for functional diversification of piezoelectric MEMS speakers.
Funder
National Natural Science Foundation of China
National Key R&D Program of China
Strategic Priority Research Program of Chinese Academy of Sciences
Shanghai Pilot Program for Basic Research—Shanghai Jiao Tong University
SJTU Trans-med Award
Oceanic Interdisciplinary Program of Shanghai Jiao Tong University
Scientific Research Fund of Second Institute of Oceanography, MNR
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
1 articles.
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