Efficient Phase and Quadrature Control of a PZT Resonant MEMS Microscanner with Piezoresistive Position Sensor-Reference-Cited by-同舟云学术

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Efficient Phase and Quadrature Control of a PZT Resonant MEMS Microscanner with Piezoresistive Position Sensor

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Frigerio Paolo,Giancristofaro Lorenzo,Molinari Luca,Furceri Raffaele,Zamprogno Marco,Carminati Roberto,Boni Nicolo,Langfelder Giacomo

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699454.pdf?arnumber=9699454

Reference12 articles.

1. MEMS Mirrors for LiDAR: A Review

2. MEMS Laser Scanners: A Review

3. Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing

4. FEM based modeling and optimization of a 2D micro mirror

5. Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors;Micromachines;2024-08-08

2. Can LSE Reduce Noise in Sensing Applications?;2023 IEEE SENSORS;2023-10-29

3. Design and Characterization of a Frequency- and Amplitude-Controlled CMOS MEMS Resonant Scanning Mirror;IEEE Sensors Letters;2023-08

4. Piezoresistive Versus Piezoelectric Position Sensing in MEMS Micromirrors: A Noise and Temperature Drift Comparison;IEEE Sensors Letters;2022-03

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