A Silicon-Micromachined Waveguide Platform With Axial Ports for Integrated Sub-THz Filters-Reference-Cited by-同舟云学术

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A Silicon-Micromachined Waveguide Platform With Axial Ports for Integrated Sub-THz Filters

Published:2022-02 Issue:2 Volume:70 Page:1221-1232
ISSN:0018-9480
Container-title:IEEE Transactions on Microwave Theory and Techniques
language:
Short-container-title:IEEE Trans. Microwave Theory Techn.

Author:

Zhao Xinghai¹^ORCID,Glubokov Oleksandr¹^ORCID,Oberhammer Joachim¹^ORCID

Affiliation:

1. Division of Micro- and Nanosystems, KTH Royal Institute of Technology, Stockholm, Sweden

Funder

H2020 European Research Council (ERC) PoC Project TERAFILT

European Research Council (ERC) through the European Union’s Horizon 2020 Research and Innovation Program

Swedish Foundation for Strategic Research Synergy Grant Electronics

European Union’s Horizon 2020 Research and Innovation Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Radiation

Link

http://xplorestaging.ieee.org/ielx7/22/9706380/09674748.pdf?arnumber=9674748

Reference51 articles.

1. Elliptical alignment holes enabling accurate direct assembly of micro-chips to standard waveguide flanges at sub-THz frequencies

2. A systematic study of DRIE process for high aspect ratio microstructuring

3. Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700

4. Micromachined multilayer bandpass filter at 270 GHz using dual-mode circular cavities

5. Investigation of Fabrication Accuracy and Repeatability of High-$Q$ Silicon-Micromachined Narrowband Sub-THz Waveguide Filters

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sub-THz Photoconductive Evanescent-Mode Waveguide SPST Switch;IEEE Microwave and Wireless Technology Letters;2024-06

2. A D-band extracted pole waveguide bandpass filter based on TE202 and TE301 resonator;AEU - International Journal of Electronics and Communications;2024-05

3. 110–170 GHz Bandpass Filter with Steep Rejection Slope Based on Symmetrical H-plane Cavities;2024 Photonics & Electromagnetics Research Symposium (PIERS);2024-04-21

4. Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices;Journal of Micromechanics and Microengineering;2024-03-08

5. Novel Negative Coupling Structure for Rectangular Waveguide Cavity Filters;2024 IEEE International Microwave Filter Workshop (IMFW);2024-02-21

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