0.02 °/h, 0.004°/√h, 6.3-mA NEMS Gyroscope With Integrated Circuit
Author:
Affiliation:
1. Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy
2. Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/10012124/10042456.pdf?arnumber=10042456
Reference23 articles.
1. Thermal Characterization of Scale-Factor and Zero-Rate Offset in Near-Navigation-Grade Nems-Based Gyroscopes
2. Capacitive readout system for micro sensors and actuators with automatic parasitic cancellation
3. On-Chip Implementable Autocalibration of Sensor Offset for Differential Capacitive Sensor Interfaces
4. A versatile analog front-end for sensors based on piezoresistive silicon nanowire detection
5. Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability
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