A BJT-Based 0.08-mm² Oversampling SAR Temperature-to-Digital Converter for Thermal Drift Compensation in MEMS Inertial Sensors
Author:
Affiliation:
1. Department of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy
2. TDK InvenSense, Assago, Italy
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/19/10367905/10453402.pdf?arnumber=10453402
Reference46 articles.
1. A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit
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3. A Novel Design of High Resolution MEMS Gyroscope Using Mode-Localization in Weakly Coupled Resonators
4. A High Performance Tactical-grade Monolithic Horizontal Dual-axis MEMS Gyroscope with Off-plane Coupling Suppression Silicon Gratings
5. A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques
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1. A 0.075 mm2 BJT-based temperature sensor with a one-point trimmed 3σ inaccuracy of ±0.97 °C from −40 °C to 120 °C;Microelectronics Journal;2024-09
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