A High Performance Tactical-grade Monolithic Horizontal Dual-axis MEMS Gyroscope with Off-plane Coupling Suppression Silicon Gratings
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/41/4387790/09617151.pdf?arnumber=9617151
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Monolithic Integrated Interface ASIC With Quadrature Error Correction for MEMS Dual-Mass Vibration Gyroscope;IEEE Sensors Journal;2024-06-01
2. Thermal Stabilization of Quality Factor for Dual-Axis MEMS Gyroscope Based on Joule Effect In Situ Dynamic Tuning;IEEE Transactions on Industrial Electronics;2024-01
3. A BJT-Based 0.08-mm² Oversampling SAR Temperature-to-Digital Converter for Thermal Drift Compensation in MEMS Inertial Sensors;IEEE Transactions on Instrumentation and Measurement;2024
4. Modeling and Simulation of a High Sensitivity MEMS Tuning Fork Gyroscope;2023 16th International Conference on Sensing Technology (ICST);2023-12-17
5. Milli-Hertz Frequency Tuning Architecture Toward High Repeatable Micromachined Axi-Symmetry Gyroscopes;IEEE Transactions on Industrial Electronics;2023-06
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