0.018 °/√hr, SUB-0.2 °/hr MEMS Pitch/Roll Piezoresistive Gyroscope with Decoupled Tilt of the Mass and of the Gauges Lever
Author:
Affiliation:
1. Politecnico di Milano,Dipartimento di Elettronica, Informazione e Bioingegneria,Italy
2. Univ. Grenobles Alpes,CEA-Leti,France
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439488.pdf?arnumber=10439488
Reference10 articles.
1. Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process
2. A High-Frequency Resonant Framed-Annulus Pitch or Roll Gyroscope for Robust High-Performance Single-Chip Inertial Measurement Units
3. A Tactical-Grade Monolithic Horizontal Dual-Axis Mems Gyroscope Based on off-Plane Quadrature Coupling Suppression Silicon Gratings
4. Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors
5. In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection
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