Molecular Dynamics Simulation on Deformation Mechanism of Chemical Mechanical Polishing
Author:
Affiliation:
1. National Kaohsiung University of Sciences and Technology, Kaohsiung 807, Taiwan No. 415,Jiangong Rd., Sanmin Dist.,Department of Mechanical Engineering,Kaohsiung City,Taiwan,807618
Funder
National Science and Technology Council
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10179490/10179492/10179507.pdf?arnumber=10179507
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3. Polishing-induced material attrition in surface-texturing AlN using a nanoscale polishing tool: An atomic-scale understanding;Tribology International;2024-04
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