Polishing-induced material attrition in surface-texturing AlN using a nanoscale polishing tool: An atomic-scale understanding
Author:
Funder
National Science and Technology Council
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference93 articles.
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4. Optimization of growth parameters of AlN thin films and investigation of electrical and electroluminescence characteristics from Au/i-AlN/n-GaN UV light-emitting diode;Zhang;Opt Laser Technol,2022
5. Powder injection molding of complex-shaped aluminium nitride ceramic with high thermal conductivity;Qin;J Eur Ceram Soc,2019
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