Atomic stick-slip behaviors and anisotropic deformations on a rough surface during GaN wafer polishing: A simulation study-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Atomic stick-slip behaviors and anisotropic deformations on a rough surface during GaN wafer polishing: A simulation study

Published:2021-08 Issue: Volume:731 Page:138744
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Nguyen Van-Thuc,Fang Te-Hua

Funder

National Kaohsiung University of Science and Technology - Jiangong Campus

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference44 articles.

1. High thermal conductivity of gallium nitride (GaN) crystals grown by HVPE process;Shibata;Mater. Trans.,2007

2. Critical evaluation of the status of the areas for future research regarding the wide band gap semiconductors diamond, gallium nitride and silicon carbide;Davis;Mater. Sci. Eng.: B,1988

3. Thermal expansion of gallium nitride;Leszczynski;J. Appl. Phys.,1994

4. New developments in gallium nitride and the impact on power electronics;Khan,2005

5. Review of using gallium nitride for ionizing radiation detection;Wang;Appl. Phys. Rev.,2015

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advances in molecular dynamics simulations for dry friction on rough substrate;Journal of Physics D: Applied Physics;2024-09-03

2. Molecular dynamics simulations in semiconductor material processing: A comprehensive review;Measurement;2024-09

3. Molecular dynamics investigation of wear mechanisms in drilling motion for FeCrNiCoAl high-entropy alloy;Tribology International;2024-08

4. Atomic surface achieved through a novel cross-scale model from macroscale to nanoscale;Nanoscale;2024

5. Molecular Dynamics Simulation on Deformation Mechanism of Chemical Mechanical Polishing;2023 9th International Conference on Applied System Innovation (ICASI);2023-04-21

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3