Transverse mode electrostatic microactuator for MEMS-based HDD slider-Reference-Cited by-同舟云学术

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Transverse mode electrostatic microactuator for MEMS-based HDD slider

Published: Issue: Volume: Page:
ISSN:
Container-title:Proceedings of Ninth International Workshop on Micro Electromechanical Systems
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Author:

Imamura T.,Koshikawa T.,Katayama M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx3/3559/10653/00493983.pdf?arnumber=493983

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Functional Realization: Electrostatic Transducers;Mechatronic Systems Design;2011-09-18

2. Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives;Design and Manufacturing of Active Microsystems;2011

3. Second-Stage Actuation for Hard Disc Drives Through MEMS Technology;IEEE Transactions on Magnetics;2010-03

4. Funktionsrealisierung – Elektrostatische Wandler;Systementwurf mechatronischer Systeme;2009-11-25

5. Thin-Film PZT Lateral Actuators With Extended Stroke;Journal of Microelectromechanical Systems;2008-08

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