Funktionsrealisierung – Elektrostatische Wandler
Author:
Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-540-78877-5_6.pdf
Reference23 articles.
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2. Bochobza-Degani O, Elata D, Nemirovsky Y (2003) A general relation between the ranges of stability of electrostatic actuators under charge or voltage control. Appl. Phys. Lett. 82: 302-304
3. Borovic B, Lewis F L, Liu A Q, Kolesar E S, Popa D (2006) The lateral instability problem in electrostatic comb drive actuators: modeling and feedback control. Journal of Micromechanics and Microengineering(7): 1233
4. Chan E K, Dutton R W (2000) Electrostatic micromechanical actuator with extended range of travel. Microelectromechanical Systems, Journal of 9(3): 321-328
5. Chen C, Lee C (2004) Design and modeling for comb drive actuator with enlarged static displacement. Sensors and Actuators A: Physical 115(2-3): 530-539
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