Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives

Author:

Ruffert C.,Saalfeld H.,Gatzen H. H.

Publisher

Springer Berlin Heidelberg

Reference19 articles.

1. Cvetkovic S, Gatzen HH (2009) Technology development for the thinning of a slider with an integrated microactuator (slim). In: Proc. EUSPEN 9th Int. Conf. 2009, San Sebastian, Spain, vol 2, pp 455–458

2. Cvetkovic S, Miletic D, Gatzen HH (2009) Relationship between removal rate and friction force of a CMP process for MEMS. In: Proc. EUSPEN 9th Int. Conf. 2009, San Sebastian, Spain, vol 2, pp 499–502

3. Dinulovic D, Saalfeld H, Celinski Z, Field S, Gatzen HH (2008) Integrated electromagnetic second stage microactuator for a hard disk recording head. IEEE Trans on Magn 44(11):3730–3733

4. Fan LS, Ottesen HH, Reiley TC, Wood RW (1995) Magnetic recording head positioning at very high track densities using a microactuatorbased, two-stage servo system. IEEE Trans Ind Electron 42(3):222–233

5. Gatzen HH (2004) Read-write head with integrated microactuator. German Patent 10260009B4 / U.S. Patent 20060238924, (2006)

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