Author:
Kamins T.I.,Lee K.F.,Gibbons J.F.,Saraswat K.C.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
52 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Applications;Polycrystalline Silicon for Integrated Circuits and Displays;1998
2. References;Thin Films by Chemical Vapour Deposition;1990
3. Artificial epitaxy (graphoepitaxy) as an approach to the formation of SOI;Microelectronic Engineering;1988-12
4. Dependence of growth length of single silicon crystals on scanning direction of laser beam in lateral seeding process;Journal of Applied Physics;1988-04-15
5. Applications;Polycrystalline Silicon for Integrated Circuit Applications;1988