Probing Buried Defects in Extreme Ultraviolet Multilayer Blanks Using Ultrasound Holography-Reference-Cited by-同舟云学术

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Probing Buried Defects in Extreme Ultraviolet Multilayer Blanks Using Ultrasound Holography

Published:2010-11 Issue:6 Volume:9 Page:671-674
ISSN:1536-125X
Container-title:IEEE Transactions on Nanotechnology
language:
Short-container-title:IEEE Trans. Nanotechnology

Author:

Shekhawat Gajendra S.,Avasthy Shraddha,Srivastava Arvind K.,Tark Soo-Hyun,Dravid Vinayak P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications

Link

http://xplorestaging.ieee.org/ielx5/7729/5623288/05491187.pdf?arnumber=5491187

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach;2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM);2021-07-12

3. Nanoscale Ferroelectric Characterization with Heterodyne Megasonic Piezoresponse Force Microscopy;Advanced Science;2021-02-15

4. Acoustic subsurface-atomic force microscopy: Three-dimensional imaging at the nanoscale;Journal of Applied Physics;2021-01

5. Subsurface imaging of rigid particles buried in a polymer matrix based on atomic force microscopy mechanical sensing;Ultramicroscopy;2019-12

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