WS<inf>2</inf> transistors on 300 mm wafers with BEOL compatibility-Reference-Cited by-同舟云学术

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WS2 transistors on 300 mm wafers with BEOL compatibility

Published:2017-09 Issue: Volume: Page:
ISSN:
Container-title:2017 47th European Solid-State Device Research Conference (ESSDERC)
language:
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Author:

Schram T.,Smets Q.,Groven B.,Heyne M. H.,Kunnen E.,Thiam A.,Devriendt K.,Delabie A.,Lin D.,Lux M.,Chiappe D.,Asselberghs I.,Brus S.,Huyghebaert C.,Sayan S.,Juncker A.,Caymax M.,Radu I. P.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8059714/8066575/08066629.pdf?arnumber=8066629

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