Control Performance Monitoring of RtR Controllers Based on Improved KL Divergence in Semiconductor Manufacturing Processes-Reference-Cited by-同舟云学术

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Control Performance Monitoring of RtR Controllers Based on Improved KL Divergence in Semiconductor Manufacturing Processes

Published:2022-08-03 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 11th Data Driven Control and Learning Systems Conference (DDCLS)
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Author:

Ling Dan¹,Li Chaosong¹,Lei Ting¹,Wang Yan¹,Guo Danlei¹

Affiliation:

1. College of Electrical and Information Enginnering, Zhengzhou University of Light Industry,Zhengzhou,45000

Funder

Key Scientific Research Project of Colleges and Universities in Henan Province

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9858328/9858343/09858568.pdf?arnumber=9858568

Reference28 articles.

1. Stability and performance analysis of mixed product run-to-run control;zheng;Journal of Process Control,2006

2. Assessment of control loop performance;harris;Canadian Journal of Chemical Engineering,1989

3. Run-to-run control and performance monitoring of overlay in semiconductor manufacturing

4. Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework

5. Multivariate Control Performance Assessment and Control System Monitoring, via Hypothesis Test on Output Covariance Matrices;yan;Industrial & Engineering Chemistry Research,2015

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