The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model-Reference-Cited by-同舟云学术

The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model

Published:2022-03 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Reliability Physics Symposium (IRPS)
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Author:

Peng Tianfang¹,You Zheng¹

Affiliation:

1. Tsinghua University,Department of Precision Instrument,Beijing,China,100084

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9764406/9764408/09764507.pdf?arnumber=9764507

Reference24 articles.

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3. A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices

4. Strength Distributions in Polycrystalline Silicon MEMS

5. Predicting Fracture in Micron-Scale Polycrystalline Silicon MEMS Structures. No. SAND2011-3665P;reedy;Sandia National Lab (SNL-NM) Albuquerque NM (United States) Sandia National Lab (SNL-CA) Livermore CA (United States),2011

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