The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model-Reference-Cited by-同舟云学术

The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model

Published:2022-03 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Reliability Physics Symposium (IRPS)
language:
Short-container-title:

Author:

Peng Tianfang¹,You Zheng¹

Affiliation:

1. Tsinghua University,Department of Precision Instrument,Beijing,China,100084

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9764406/9764408/09764507.pdf?arnumber=9764507

Reference24 articles.

1. Design of multiphysics actuators using topology optimization – Part I: One-material structures

2. An integrated simulation-based generative design method for microelectromechanical systems;bolognini;Diss,2009

3. A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices

4. Strength Distributions in Polycrystalline Silicon MEMS

5. Predicting Fracture in Micron-Scale Polycrystalline Silicon MEMS Structures. No. SAND2011-3665P;reedy;Sandia National Lab (SNL-NM) Albuquerque NM (United States) Sandia National Lab (SNL-CA) Livermore CA (United States),2011

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range;Micromachines;2024-01-30

2. Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method;Micromachines;2023-06-01

3. An Analytical Model of Transient Response of MEMS under High-G shock for Reliability Assessment;2022 IEEE International Reliability Physics Symposium (IRPS);2022-03