Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor-Reference-Cited by-同舟云学术

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Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor

Published:2014-11 Issue: Volume: Page:
ISSN:
Container-title:IEEE SENSORS 2014 Proceedings
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Author:

Sohgawa Masayuki,Nozawa Akito,Yokoyama Hokuto,Kanashima Takeshi,Okuyama Masanori,Abe Takashi,Noma Haruo,Azuma Teruaki

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6971895/6984913/06985362.pdf?arnumber=6985362

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-sensitive tactile force/proximity sensor based on monolithically integrated microcantilever;Sensors and Actuators A: Physical;2024-10

2. Sensitivity Dependence Analysis of Multi-axis Tactile Sensors on the Bump Position of Contact Area and Sensing Device Design Based on the Analysis;IEEJ Transactions on Sensors and Micromachines;2024-05-01

3. Dual-Detections of Tactile Force and Proximity with an Ultra-Sensitive Integrated Microcantilever Sensor;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

4. Improved Reproducibility of Deflection Control Process for Cantilever‐Type MEMS Tactile Sensors;IEEJ Transactions on Electrical and Electronic Engineering;2024-01-05

5. MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics;Micromachines;2022-11-23

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