Improved Reproducibility of Deflection Control Process for Cantilever‐Type MEMS Tactile Sensors

Abstract

This paper describes an improved process for controlling the initial deflection structure of cantilever‐type MEMS tactile sensors. By using residual stress, deposition sequence, and metal layer patterns, the initial deflection of the cantilever was successfully aligned to the same initial deflection with micron accuracy and 97% yield in a simpler and easier process than previous processes. This enables a reduction in the number of processes and flexible control of deflection, which is expected to improve yield and shorten fabrication time. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.