Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control-Reference-Cited by-同舟云学术

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Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control

Published:2020-03 Issue:2 Volume:28 Page:413-424
ISSN:1063-6536
Container-title:IEEE Transactions on Control Systems Technology
language:
Short-container-title:IEEE Trans. Contr. Syst. Technol.

Author:

Boeren Frank^ORCID,Lanzon Alexander^ORCID,Oomen Tom^ORCID

Funder

Philips

Engineering and Physical Sciences Research Council

Netherlands Organisation for Scientific Research through the Research Programme VIDI

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/87/8998600/08558693.pdf?arnumber=8558693

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Performance Flux Tracking Controller for Reluctance Actuator;Applied Sciences;2023-09-28

2. Comparing multivariable uncertain model structures for data‐driven robust control: Visualization and application to a continuously variable transmission;International Journal of Robust and Nonlinear Control;2023-07-03

3. Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method;Frontiers in Energy Research;2022-08-19

4. Control-Relevant Model Selection for Servo Control Systems;2022 8th International Conference on Control, Decision and Information Technologies (CoDIT);2022-05-17

5. 面向IC光刻的超精密运动台控制技术;Laser & Optoelectronics Progress;2022

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