Author:
Miao Qian,Liu Yang,Tan Jiu Bin
Abstract
The performance of the actuator is becoming increasingly important in the ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters cannot provide enough force for the next-generation motion stage in the semiconductor industry since they achieve a physical limit of power factor. To tackle this problem, this study develops a novel-driven approach and its control strategy for high-dynamic stages. Explicitly, the proposed method utilizes a linear reluctance motor as an actuator, which could promote the continuous thrust significantly. A heuristic optimization-based Bouc–Wen model is established to describe the nonlinear behavior of the novel actuator. Also, a flux control algorithm based on the integral sliding mode is derived and adjusted for precision thrust generation. Comparative simulations on a specific linear reluctance motor confirm the effectiveness and superiority of the proposed method and show that it has the ability to conquer the force nonlinearity of the novel actuator.
Funder
National Natural Science Foundation of China
Subject
Economics and Econometrics,Energy Engineering and Power Technology,Fuel Technology,Renewable Energy, Sustainability and the Environment
Cited by
2 articles.
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