A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index
Author:
Affiliation:
1. Process Manufacturing Department, Intel Corporation, Rio Rancho, NM, USA
2. Supply Chain Department, Intel Corporation, Chandler, AZ, USA
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/66/9851188/09790328.pdf?arnumber=9790328
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1. Strategic view of an assets health index for making long-term decisions in different industries;de la fuente;Proc ESREL,2018
2. Asset-management decision-support modeling, using a health and risk model
3. Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process
4. Development of a Predictive and Preventive Maintenance Demonstration System for a Semiconductor Etching Tool
5. Impact of integrating equipment health in production scheduling for semiconductor fabrication
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2. Graphical approach of equipment health monitoring using network analysis;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01
3. Graphical approach of equipment health monitoring using network analysis;2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM);2023-03-07
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