Funder
Ministry of Science and Technology, Taiwan, ROC
Agence Nationale de la Recherche (ANR), France
Subject
General Engineering,General Computer Science
Reference34 articles.
1. Agrawal, G. K., Loh, S. Y., & Shebi, A. B. (2015). Advanced Process Control (APC) and Real Time Dispatch (RTD) system integration for etch depth control process in 300mm Fab. In 26th Annual SEMI/IEEE Advanced Semiconductor Manufacturing Conference (ASMC2015) (pp. 390–394).
2. A memetic algorithm to solve an unrelated parallel machine scheduling problem with auxiliary resources in semiconductor manufacturing;Bitar;Journal of Scheduling,2016
3. Bixby, R., Burda, R., & Miller, D. (2006). Short-interval detailed production scheduling in 300 mm semiconductor manufacturing using mixed integer and constraint programming. In 17th Annual SEMI/IEEE Advanced Semiconductor Manufacturing Conference (ASMC2006) (pp. 148–154).
4. Tool condition diagnosis with a recipe-independent hierarchical monitoring scheme;Blue;IEEE Transaction on Semiconductor Manufacturing,2013
5. Towards Bayesian network methodology for predicting the equipment health factor of complex semiconductor systems;Bouaziz;International Journal of Production Research,2013
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