Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations-Reference-Cited by-同舟云学术

Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations

Published:2023-11 Issue:4 Volume:36 Page:578-589
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Zhang Bin¹,Wu Cheng-Hung²^ORCID

Affiliation:

1. Institute of Industrial Engineering, National Taiwan University, Taipei, Taiwan

2. Institute of Industrial Engineering, the Department of Mechanical Engineering, and the Department of Business Administration, National Taiwan University, Taipei, Taiwan

Funder

National Science and Technology Council

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/10299929/10020172.pdf?arnumber=10020172

Reference39 articles.

1. An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing

2. Comparative Advantage

3. Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing

4. Impact of integrating equipment health in production scheduling for semiconductor fabrication

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