Author:
Agrawal Gaurav K.,Loh Soon Yoong,Shebi Abemelek B.
Cited by
7 articles.
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1. Feedback Control in Station Dispatching to Improve Constraint Tool Output in 300mm Fabs;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13
2. Auto Chamber Validation;2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2021-05-10
3. Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment;Electronics;2021-04-15
4. Advanced Process Control (APC) for Selective EPI process in 300mm Fab;2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2020-08
5. An Artificial Neural Network Based Algorithm For Real Time Dispatching Decisions;2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2020-08