Limits for Dicing Speed Based on Crack Stop Constructions with Different Levels of Robustness-Reference-Cited by-同舟云学术

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Limits for Dicing Speed Based on Crack Stop Constructions with Different Levels of Robustness

Published:2024-05-28 Issue: Volume: Page:2013-2016
ISSN:
Container-title:2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
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Author:

Heidenblut Maria¹,Goroll Michael²,Kaiser Stefan²,Bauer Andreas¹,Hopfauf Kristina¹

Affiliation:

1. Infineon Technologies AG,Regensburg,Germany

2. Infineon Technologies AG,Munich,Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10564841/10564831/10564968.pdf?arnumber=10564968

Reference4 articles.

1. Implementation of New Robustness Assessment Methodology for Crack Stop Constructions

2. Determination of Fracture Properties of Thin Dielectric Films by Nanoindentation;Ananiev

3. Die Edge Crack Propagation Modeling for Risk Assessment of Advanced Technology Nodes

4. Innovative Design of Crackstop Wall for 14nm Technology Node and Beyond

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