Effects of Gas Pressure on the Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition
Author:
Affiliation:
1. Department of Electronics, Kyushu University
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Subject
Condensed Matter Physics
Link
https://www.jstage.jst.go.jp/article/pfr/14/0/14_4406115/_pdf
Reference40 articles.
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