Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films
Author:
Funder
JSPS
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference60 articles.
1. Review of cathodic arc deposition for preparing droplet-free thin films;Takikawa;IEEE Transactions on Plasma Science,2007
2. A critical review of diamond like carbon coating for wear resistance applications;Tyagi;International Journal of Refractory Metals and Hard Materials,2019
3. The effect of radio frequency power on the structural and optical properties of a-C:H films prepared by PECVD;Xiao;Journal of Materials Research,2017
4. Revealing the corrosion resistance of amorphous carbon films under heat shock via annealing;Zhao;Diamond and Related Materials,2020
5. Material properties and tribological performance of rf-PECVD deposited DLC coatings;Clay;Diamond and Related Materials,1998
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma using tailored voltage waveform discharges;Japanese Journal of Applied Physics;2024-07-01
2. Effect of tail time of discharge current on film properties in diamond-like carbon deposition by high-frequency inclusion high-power impulse magnetron sputtering;Diamond and Related Materials;2023-05
3. Insights into the application of carbon materials in heterojunction solar cells;Materials Science and Engineering: R: Reports;2023-02
4. Influence of Heat Treatment on Corrosion Resistance of Sn/Mg Films Formed by PVD Method on Hot-Dip Galvanized Steel;Coatings;2023-01-15
5. Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate;Thin Solid Films;2022-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3