Author:
Li Hui 李慧,Wu Xiaobin 吴晓斌,Han Xiaoquan 韩晓泉,Ma He 马赫,Sha Pengfei 沙鹏飞
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. 极紫外光刻离轴照明技术研究;王君;光学学报,2012
2. Study on the off-axis illumination for extreme ultraviolet lithography;C S Jin;Acta Optica Sinica,2012
3. Off-axis illumination for optical lithography;L P Guo;Laser Journal,2005
4. 光学光刻中的离轴照明技术;郭立萍;激光杂志,2005
5. 深紫外光刻复杂照明光学系统设计;赵阳,2010
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