THE FORMULAS FOR THE SECONDARY ELECTRON YIELD AT HIGH INCIDENT ELECTRON ENERGY FROM GOLD AND ALUMINUM

Abstract

Based on the main physical processes of secondary electron emission from metals, the relation that the product of the number of secondary electron released per primary electron at high incident electron energy and the (n-1)th power of incident energy of primary electron is equal to constant C was deduced, where n is the energy exponent, based on the relation between the number of secondary electron released per primary electron at high incident electron energy and secondary electron yield. The relation that the product of the secondary electron yield at high incident electron energy and the (n-1)th power of incident energy of primary electron is equal to constant D was deduced. The constant D and the energy exponent n of the primary electron in the energy range 10 to 100 keV hitting on gold and aluminum are computed with the ESTAR program and experimental results in scanning electron microscope (SEM), respectively, therefore, the formulas for the incident energy dependence of secondary electron yield in the energy range 10 to 100 keV from gold and aluminum were deduced. The formulas were proved to be true by experimental results in SEM. The results were discussed and a conclusion was drawn. The formulas from gold and aluminum were successfully deduced.