SILICON OXIDE DECOMPOSITION AND DESORPTION DURING THE THERMAL OXIDATION OF SILICON
Author:
Affiliation:
1. Departments of Chemistry and Physics, and Laboratory for Surface Modification, Rutgers University, Piscataway, NJ 08854-8087, USA
Abstract
Publisher
World Scientific Pub Co Pte Lt
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
https://www.worldscientific.com/doi/pdf/10.1142/S0218625X99000081
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