Electron Probe Phase using Defocus in Scanning Electron Microscopy
Author:
Affiliation:
1. Rochester Institute of Technology , Rochester, NY , USA
Publisher
Oxford University Press (OUP)
Subject
Instrumentation
Link
https://academic.oup.com/mam/article-pdf/29/Supplement_1/454/50932318/ozad067.213.pdf
Reference8 articles.
1. A Software Approach to Improving SEM Resolution, Image Quality, and Productivity
2. The Determination and Application of the Point Spread Function in the Scanning Electron Microscope
3. Direct Measurement of the Electron Beam Spatial Intensity Profile via Carbon Nanotube Tomography
4. Beam shaping and probe characterization in the scanning electron microscope
5. Phase retrieval through focus variation for ultra-resolution in field-emission transmission electron microscopy
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