Affiliation:
1. Research Institute for Material and Chemical Measurement, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565 Japan
Abstract
Abstract
We have developed a new certified reference material (CRM) for image sharpness evaluation and magnification calibration for scanning electron microscopy (SEM). Designed to be suitable for the image sharpness evaluation by the derivative method, the CRM has nanoscale tungsten dot-array structure fabricated on silicon substrate, which gives steep contrast transition from the dot to the substrate in SEM image. The pitch of the dot-array was SI-traceably measured as a specified value with relative expanded uncertainty ($k=2$) of ~1.3%, which can be utilized for the magnification calibration of SEM. Since specimens, as one of the image formation parameters, easily affect image sharpness value, our CRM, as a ‘pinned specimen’, will play an important role to achieve robust and stable image sharpness measurement system.
Publisher
Oxford University Press (OUP)
Subject
Radiology, Nuclear Medicine and imaging,Instrumentation,Structural Biology
Cited by
8 articles.
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