Latest Developments in Post-FIB Concentrated Ar Ion Beam Milling of TEM Specimens with Large Electron-transparent Areas
Author:
Affiliation:
1. E.A. Fischione Instruments, Inc. , Export, PA , USA
Publisher
Oxford University Press (OUP)
Link
https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.1091/58668802/ozae044.1091.pdf
Reference5 articles.
1. Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens
2. Targeted Ion Milling of Ex Situ Lift-Out FIB Specimens
3. Accurate Removal of Implanted Gallium and Amorphous Damage from TEM Specimens after Focused Ion Beam (FIB) Preparation
4. A Small Spot, Inert Gas, Ion Milling Process as a Complementary Technique to Focused Ion Beam Specimen Preparation
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