Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
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Published:2017-05-23
Issue:1
Volume:8
Page:117-126
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ISSN:2191-916X
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Container-title:Mechanical Sciences
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language:en
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Short-container-title:Mech. Sci.
Author:
Ding Bingxiao, Li YangminORCID, Xiao Xiao, Tang Yirui, Li Bin
Abstract
Abstract. Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator has three degrees of freedom (DOF), i.e. two translations along the X and Y axes and one rotation around Z axis. In order to get a large workspace, the lever mechanism is adopted to magnify the stroke of the piezoelectric actuators and also the leaf beam flexure is utilized due to its large rotational scope. Different from conventional pre-tightening mechanism, a modified pre-tightening mechanism, which is less harmful to the stacked actuators, is proposed in this paper. Taking the circular flexure hinges and leaf beam flexures hinges as revolute joints, the forward kinematics and inverse kinematics models of this stage are derived. The workspace of the micromanipulator is finally obtained, which is based on the derived kinematic models.
Funder
National Natural Science Foundation of China Fundo para o Desenvolvimento das Ciências e da Tecnologia
Publisher
Copernicus GmbH
Subject
Industrial and Manufacturing Engineering,Fluid Flow and Transfer Processes,Mechanical Engineering,Mechanics of Materials,Civil and Structural Engineering,Control and Systems Engineering
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