Design and analysis of a novel flexure-based 3-DOF mechanism

Author:

Bhagat Umesh,Shirinzadeh Bijan,Clark Leon,Chea Peter,Qin Yanding,Tian Yanling,Zhang Dawei

Funder

ARC LIEF

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Mechanics of Materials,Bioengineering

Reference44 articles.

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2. Integrating positioning X–Y stage based on bulk micromachining;Wang;Guangxue Jingmi Gongcheng,2009

3. A flexure-based mechanism and control methodology for ultra-precision turning operation;Tian;Precis. Eng.,2009

4. Atomic force microscope with improved scan accuracy, scan speed, and optical vision;Kwon;Rev. Sci. Instrum.,2003

5. A micro-displacement stage for scanning white-light interferometry;Dai;J. Phys. Conf. Ser.,2005

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