Research on a UV-assisted chemical modification strategy for monocrystalline silicon
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Published:2021-02-11
Issue:1
Volume:12
Page:133-141
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ISSN:2191-916X
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Container-title:Mechanical Sciences
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language:en
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Short-container-title:Mech. Sci.
Author:
Ren Yinghui,Li Kexin,Li Wei,Han Xu,Liu Xiaoman
Abstract
Abstract. A novel UV-assisted chemical modification (UVA-CM)
strategy is proposed for micro-grinding monocrystalline silicon based on UV
photocatalysis theory in order to develop a combined machining technology. Comparative experiments are carried out between a single heating chemical modification (H-CM) strategy and a hybrid UVA-CM strategy. The effects of
different modification strategies on modification degree and mechanical
properties of a modified layer are evaluated by inductively coupled plasma mass spectrometry (ICP), Raman spectral analysis, nanoindentation test, and
scratch test. The experimental results show that silicate substance is
generated on the modified layer surface via the UVA-CM technique. The modified layer under UVA-CM is thicker than that under the H-CM strategy, which also
presents relatively lower nanohardness. With the same scratch condition, the
modified layer under UVA-CM contributes to inhibiting lateral crack
propagation. It is demonstrated that the liquid–solid chemical modification effect is obviously enhanced through UV advanced oxidation reaction. The UVA-CM strategy will contribute to developing a novel hybrid chemo-mechanical process for micro-grinding monocrystalline silicon.
Funder
National Natural Science Foundation of China
Publisher
Copernicus GmbH
Subject
Industrial and Manufacturing Engineering,Fluid Flow and Transfer Processes,Mechanical Engineering,Mechanics of Materials,Civil and Structural Engineering,Control and Systems Engineering
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