X-ray metrology for advanced microelectronics
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap/2009211/pdf
Reference62 articles.
1. High resolution hard x-ray microscope on a second generation synchrotron source
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3. Scanning x-ray diffraction with 200nm spatial resolution
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5. International Technology Roadmap for Semiconductors, http://public.itrs.net
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