Mechanical Behaviour of Sputtered Aluminium Thin Films under High Sliding Loads

Abstract

In this work, the wear behaviour of thin aluminium films deposited on stainless-steel substrate through rf magnetron sputtering is studied. The coefficient of friction and material loss are characterised as functions of the substrate temperature (Ts) of the deposited aluminium thin films. It was observed that due to the evolving microstructural and roughness properties of the films with the substrate temperature, the material behaviour of the films under extremely high wear loads significantly depend on the substrate temperature. The most significant coefficient of friction was observed at 60oC and 80oC, and highest material loss was recorded at 100oC. The material loss and variation of coefficient of friction were related to the morphology (porosity and roughness) of the sputtered aluminium thin films.